專利授權


具高傾斜角與高反射率之微結構三維形貌量(檢測之險為共焦量(檢測裝置與方法(一種利用光學偏極特性之三維顯微共焦量測系統與方法 


專利名稱 利用光學偏極特性之三維顯微共焦量測系統與方法
專利國家
   專利證書號
美國 US 8,416,491 B2
專利權人 國立台北科技大學
發明人 陳亮嘉、郭世炫、陳聖涵、張奕威、王浩偉
應用領域
需求項目









技術摘要


A method and system for three-dimensional polarization-based confocal microscopy are provided in the present disclosure for analyzing the surface profile of an object. In the present disclosure, a linear-polarizing structured light formed by an optical grating is projected on the object underlying profile measurement. By means of a set of polarizers and steps of shifting the structured light, a series of images with respect to the different image-acquired location associated with the object are obtained using confocal principle. Following this, a plurality of focus indexes respectively corresponding to a plurality of inspected pixels of each image are obtained for forming a focus curve with respect to the measuring depth and obtaining a peak value associated with each depth response curve. Finally, a depth location with respect to the peak value for each depth response curve is obtained for reconstructing the surface profile of the object.


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