專利授權


振動位移與振動頻率決定方法與其裝置 


專利名稱 振動位移與振動頻率決定方法與其裝置
專利國家
   專利證書號
美國 US8018601B2
專利權人 國立台北科技大學
發明人 陳亮嘉、連俊泰、陳金亮、黃煥祺、鄒永桐、賴皇文
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技術摘要


A exemplary method for determining vibration displacement in interferometric scanning, in which two optical signals having a phase difference with each other of a high-coherence interferogram corresponding to a tested surface is detected for determining a shifting displacement between the reference plane of interferometric apparatus and the tested surface. In one embodiment, a series of the shifting displacements with respect to a time interval are measured for determining the vibrating frequency of the tested surface by spectrum analysis. Meanwhile, an exemplary interferometric apparatus is also disclosed for calculating the relative position between the tested surface and the reference plane of interferometric apparatus whereby the interferometric apparatus is capable of compensating influences of vibration caused by the environment or the tested surface itself so as to obtain the surface profile and vibration frequency of the tested surface.


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