可授權專利


可生物降解的微針陣列


專利名稱 / Patent Title 可生物降解的微針陣列
專利國家 / Country
   專利證書號 / Registration Number
中華民國 / TW I688405
專利權人 / Applicant 國立臺北科技大學 / National Taipei University of Technology
發明人 / Inventor 華國媛/ Kuo-Yuan Hwa, 程耀毅

專利詳細說明
Patent Details

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技術摘要 / Abstract


PROBLEM TO BE SOLVED: To inexpensively provide a polishing device that can implement multistep polishing of a substrate.SOLUTION: A polishing device includes: a plurality of polishing tables 30C and 30D for supporting each abrasive pad 10; a first polishing head 31C having a plurality of pressure chambers C1 to C4 in which pressure is generated for pressing a substrate W against the abrasive pad 10; and a second polishing head 31D having a plurality of pressure chambers D1 to D4 in which pressure is generated for pressing the substrate W against the abrasive pad 10. Arrangement of the plurality of pressure chambers D1 to D4 of the second polishing head 31D is different from an arrangement of the plurality of pressure chambers C1 to C4 of the first polishing head 31C.SELECTED DRAWING: Figure 9


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