可生物降解的微針陣列
 專利名稱 / Patent Title |
可生物降解的微針陣列 |
專利國家 / Country
專利證書號 / Registration Number |
|
| 專利權人 / Applicant |
國立臺北科技大學 / National Taipei University of Technology |
| 發明人 / Inventor |
華國媛/ Kuo-Yuan Hwa, 程耀毅 |
技術摘要 / Abstract
PROBLEM TO BE SOLVED: To inexpensively provide a polishing device that can implement multistep polishing of a substrate.SOLUTION: A polishing device includes: a plurality of polishing tables 30C and 30D for supporting each abrasive pad 10; a first polishing head 31C having a plurality of pressure chambers C1 to C4 in which pressure is generated for pressing a substrate W against the abrasive pad 10; and a second polishing head 31D having a plurality of pressure chambers D1 to D4 in which pressure is generated for pressing the substrate W against the abrasive pad 10. Arrangement of the plurality of pressure chambers D1 to D4 of the second polishing head 31D is different from an arrangement of the plurality of pressure chambers C1 to C4 of the first polishing head 31C.SELECTED DRAWING: Figure 9
聯繫方式 / Contact
聯絡人：專利暨技術移轉中心
Liaison : PTTC
電 話：(02)8772-0360
TEL
地 址：10608 台北市忠孝東路三段1號 行政大樓5樓
Address : 5F, Administration Building, 1, Sec. 3, Zhongxiao E. Rd., Taipei 10608 Taiwan.
專利行銷平台