線型多波長共焦顯微鏡模組以及線型多波長共焦顯微方法與系統
Slit-scan multi-wavelength confocal lens module and slit-scan microscopic system and method using the same
 專利名稱 / Patent Title |
線型多波長共焦顯微鏡模組以及線型多波長共焦顯微方法與系統
Slit-scan multi-wavelength confocal lens module and slit-scan microscopic system and method using the same |
專利國家 / Country
專利證書號 / Registration Number |
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| 專利權人 / Applicant |
國立臺北科技大學 / National Taipei University of Technology |
| 發明人 / Inventor |
陳亮嘉/ Liang-Chia Chen, 陳昭南/ Chao-Nan Chen, 張奕威/ Yi-Wei Chang |
技術摘要 / Abstract
The present invention provides a slit-scan multi-wavelength confocal lens module, utilizing at least two lenses having chromatic aberration for splitting a broadband light into continuously linear spectral lights having different focal length respectively. The present invention utilizes the confocal lens module employing slit-scan confocal principle and chromatic dispersion techniques and the confocal microscopy with optical sectioning ability and high resolution in spectral dispersion to establish a confocal microscopy method and system with long DOF and high resolution, capable of modulating a broadband light to produce the axial chromatic dispersion and focus on different depths toward an object's surface for obtaining the reflected light spectrum from the surface. Thereafter, the spectrum is spatially filtered by a slit and then a peak position with respect to the filtered spectrum along the scanning line is detected by a spectral image sensing unit for generating the sectional profile of the measured surface.
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