利用光學偏極特性之三維顯微共焦量測系統與方法
Method and system for three-dimensional polarization-based confocal microscopy
 專利名稱 / Patent Title |
利用光學偏極特性之三維顯微共焦量測系統與方法
Method and system for three-dimensional polarization-based confocal microscopy |
專利國家 / Country
專利證書號 / Registration Number |
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| 專利權人 / Applicant |
國立臺北科技大學 / National Taipei University of Technology |
| 發明人 / Inventor |
陳亮嘉/ Liang-Chia Chen, 郭世炫/ Shih-Hsuan Kuo, 陳聖涵/ Sheng-Han Chen, 張奕威/ Yi-Wei Chang, 王浩偉/ Hau-Wei Wang |
技術摘要 / Abstract
A method and system for three-dimensional polarization-based confocal microscopy are provided in the present disclosure for analyzing the surface profile of an object. In the present disclosure, a linear-polarizing structured light formed by an optical grating is projected on the object underlying profile measurement. By means of a set of polarizers and steps of shifting the structured light, a series of images with respect to the different image-acquired location associated with the object are obtained using confocal principle. Following this, a plurality of focus indexes respectively corresponding to a plurality of inspected pixels of each image are obtained for forming a focus curve with respect to the measuring depth and obtaining a peak value associated with each depth response curve. Finally, a depth location with respect to the peak value for each depth response curve is obtained for reconstructing the surface profile of the object.
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