抗振型干涉掃描系統及其方法
Vibration-resistant interferometric scanning system and method thereof
 專利名稱 / Patent Title |
抗振型干涉掃描系統及其方法
Vibration-resistant interferometric scanning system and method thereof |
專利國家 / Country
專利證書號 / Registration Number |
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| 專利權人 / Applicant |
國立臺北科技大學 / National Taipei University of Technology |
| 發明人 / Inventor |
葉勝利/ Sheng-Lih Yeh, 陳亮嘉/ Liang-Chia Chen, 林世聰/ Shyh-Tsong Lin |
技術摘要 / Abstract
A vibration-resistant interferometric scanning system and method are provided in the present invention. In the present invention, the brightness distribution in a high-coherence interference pattern is analyzed so as to perform a compensation action to lock the brightness distribution of a high-coherence interference pattern and consequently locking the fringe distribution of a low-coherence interference pattern or to perform a scanning operation composed of plural shifting actions with specified scanning distances in sequence and plural compensation actions to lock the fringe distribution in a low-coherence interference pattern corresponding to the surface profile of a measured object. Consequently, with the system and method of the present invention, the surface profile of a measured object disturbed by external or internal vibrations can be measured accurately and precisely.
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