可授權專利


微針藥物傳輸系統及其製法 


專利名稱 可生物降解的微針陣列
專利國家
   專利證書號
日本 特許第6567716?
中華民國 I688405
專利權人 國立台北科技大學
發明人 華國媛、程耀毅
應用領域
需求項目









技術摘要


PROBLEM TO BE SOLVED: To inexpensively provide a polishing device that can implement multistep polishing of a substrate.SOLUTION: A polishing device includes: a plurality of polishing tables 30C and 30D for supporting each abrasive pad 10; a first polishing head 31C having a plurality of pressure chambers C1 to C4 in which pressure is generated for pressing a substrate W against the abrasive pad 10; and a second polishing head 31D having a plurality of pressure chambers D1 to D4 in which pressure is generated for pressing the substrate W against the abrasive pad 10. Arrangement of the plurality of pressure chambers D1 to D4 of the second polishing head 31D is different from an arrangement of the plurality of pressure chambers C1 to C4 of the first polishing head 31C.SELECTED DRAWING: Figure 9


專利商品特色




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電 話:(02)2771-2171
地 址:10608 台北市忠孝東路三段1號 行政大樓5樓
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