可授權專利


抗振型干涉掃描系統及其方法 


專利名稱 抗振型干涉掃描系統及其方法
專利國家
   專利證書號
美國 US 7,855,791 B2
專利權人 國立台北科技大學
發明人 葉勝利、陳亮嘉、林世聰
應用領域
需求項目









技術摘要


A vibration-resistant interferometric scanning system and method are provided in the present invention. In the present invention, the brightness distribution in a high-coherence interference pattern is analyzed so as to perform a compensation action to lock the brightness distribution of a high-coherence interference pattern and consequently locking the fringe distribution of a low-coherence interference pattern or to perform a scanning operation composed of plural shifting actions with specified scanning distances in sequence and plural compensation actions to lock the fringe distribution in a low-coherence interference pattern corresponding to the surface profile of a measured object. Consequently, with the system and method of the present invention, the surface profile of a measured object disturbed by external or internal vibrations can be measured accurately and precisely.


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