可授權專利


奈米級XY平台裝置 


專利名稱 奈米級XY平台裝置
專利國家
   專利證書號
美國 US 7,241,712 B2
專利權人 國立台北科技大學
發明人 顏炳郎、蔡習訓、盧天生、陳佑任、林建瑋、蕭文益
應用領域
需求項目









技術摘要


The present invention discloses an XY platform device with nanoscale precision including an optical pickup head for focusing and seeking the tracks of an optical data storage medium; a servo device for driving the optical pickup head to move in focusing and radial directions; a carrier platform for receiving a testing object thereon and providing a connecting member to be connected with the optical pickup head. With the focusing and radial movements of the optical pickup head, the carrier platform is driven to move accordingly, and thus achieving the high-precision and low-cost effects.


專利商品特色




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